Publication:

Composite polymer core – ceria shell abrasive particles during silicon oxide CMP

Date

2007
Proceedings Paper
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dc.contributor.authorArmini, Silvia
dc.contributor.authorDe Messemaeker, Joke
dc.contributor.authorBurtovyy, Ruslan
dc.contributor.authorLuzinov, Igor
dc.contributor.authorWhelan, Caroline
dc.contributor.authorMoinpour, Mansour
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorDe Messemaeker, Joke
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecDe Messemaeker, Joke::0000-0002-4872-0176
dc.date.accessioned2021-10-16T15:00:47Z
dc.date.available2021-10-16T15:00:47Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11653
dc.source.beginpageC8.4
dc.source.conferenceAdvances and Challenges in Chemical Mechanical Planarization
dc.source.conferencedate8/04/2007
dc.source.conferencelocationSan Francisco, CA USA
dc.title

Composite polymer core – ceria shell abrasive particles during silicon oxide CMP

dc.typeProceedings paper
dspace.entity.typePublication
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