Publication:

RTA-preparation of b-FeSi2 layers from MBE-grown FeSi films deposited on SiGe(100) substrates

Date

1995
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorLibezny, Milan
dc.contributor.authorPoortmans, Jef
dc.contributor.authorDekoster, J.
dc.contributor.authorDegroote, S.
dc.contributor.authorVantomme, Andre
dc.contributor.authorde Lange, B. G. M.
dc.contributor.authorLangouche, G.
dc.contributor.authorNijs, Johan
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorVantomme, Andre
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.accessioned2021-09-29T13:09:23Z
dc.date.available2021-09-29T13:09:23Z
dc.date.embargo9999-12-31
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/726
dc.source.beginpage407
dc.source.conferenceRapid Thermal and Integrated Processing IV
dc.source.conferencedate17/04/1995
dc.source.conferencelocationSan Francisco, CA USA
dc.source.endpage412
dc.title

RTA-preparation of b-FeSi2 layers from MBE-grown FeSi films deposited on SiGe(100) substrates

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
700.pdf
Size:
258.25 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions