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Role of ambient composition on the formation and shape of watermarks on a bare silicon substrate
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Role of ambient composition on the formation and shape of watermarks on a bare silicon substrate
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Date
2014
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tamaddon, Amir-Hossein
;
Mertens, Paul
;
Vermant, Jan
;
Vereecke, Guy
;
Holsteyns, Frank
;
Heyns, Marc
;
De Gendt, Stefan
Journal
ECS Journal of Solid State Science and Technology
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1992
since deposited on 2021-10-22
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Acq. date: 2025-12-09
Citations
Metrics
Views
1992
since deposited on 2021-10-22
3
last month
1
last week
Acq. date: 2025-12-09
Citations