Publication:
Use of 3D Xray microscopy for BEOL and advanced packaging failure analysis
Date
| dc.contributor.author | Schmidt, Christian | |
| dc.contributor.author | Kelly, Stephen T. | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-24T13:03:00Z | |
| dc.date.available | 2021-10-24T13:03:00Z | |
| dc.date.issued | 2017-11 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/29389 | |
| dc.source.beginpage | 508 | |
| dc.source.conference | International Symposium on Testing and Failure analysis - ISTFA | |
| dc.source.conferencedate | 5/11/2017 | |
| dc.source.conferencelocation | Pasadena, CA USA | |
| dc.source.endpage | 513 | |
| dc.title | Use of 3D Xray microscopy for BEOL and advanced packaging failure analysis | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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