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Analysis of the nonlinear behavior of a MEMS variable capacitor
Publication:
Analysis of the nonlinear behavior of a MEMS variable capacitor
Date
2002
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Innocent, Manuel
;
Wambacq, Piet
;
Donnay, Stephane
;
Tilmans, Harrie
;
Engels, Marc
;
De Man, Hugo
;
Sansen, Willy
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1878
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1878
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations