Publication:
Thin-film aerogel porosity and stiffness characterized by surface acoustic wave spectroscopy
Date
| dc.contributor.author | Flannery, C.M. | |
| dc.contributor.author | Murray, C. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Streiter, I. | |
| dc.contributor.author | Schultz, S.E> | |
| dc.date.accessioned | 2021-10-14T21:37:53Z | |
| dc.date.available | 2021-10-14T21:37:53Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6326 | |
| dc.source.beginpage | L12.7 | |
| dc.source.conference | Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics II | |
| dc.source.conferencedate | 16/04/2001 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | Thin-film aerogel porosity and stiffness characterized by surface acoustic wave spectroscopy | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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