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Time dependent dielectric breakdown (TDDB) evaluation of PE-ALD SiN gate dielectrics of AlGaN/GaN recessed gate D-mode MIS-HEMTs and E-mode MIS-FETs
Publication:
Time dependent dielectric breakdown (TDDB) evaluation of PE-ALD SiN gate dielectrics of AlGaN/GaN recessed gate D-mode MIS-HEMTs and E-mode MIS-FETs
Date
2015
Proceedings Paper
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30817.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wu, Tian-Li
;
Marcon, Denis
;
De Jaeger, Brice
;
Van Hove, Marleen
;
Bakeroot, Benoit
;
Stoffels, Steve
;
Groeseneken, Guido
;
Decoutere, Stefaan
;
Roelofs, Robin
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1844
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Acq. date: 2025-11-02
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Metrics
Views
1844
since deposited on 2021-10-23
1
last week
Acq. date: 2025-11-02
Citations