Publication:
Robustness of electrostatic MEMS actuators against electrical overstress
Date
| dc.contributor.author | De Coster, Jeroen | |
| dc.contributor.author | Rottenberg, Xavier | |
| dc.contributor.author | Sangameswaran, Sandeep | |
| dc.contributor.author | Ekkels, Phillip | |
| dc.contributor.author | Tilmans, Harrie | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | De Coster, Jeroen | |
| dc.contributor.imecauthor | Rottenberg, Xavier | |
| dc.contributor.imecauthor | Tilmans, Harrie | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-17T21:45:49Z | |
| dc.date.available | 2021-10-17T21:45:49Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15165 | |
| dc.source.beginpage | 893 | |
| dc.source.conference | Transducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems | |
| dc.source.conferencedate | 21/06/2009 | |
| dc.source.conferencelocation | Denver, CO USA | |
| dc.source.endpage | 896 | |
| dc.title | Robustness of electrostatic MEMS actuators against electrical overstress | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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