Publication:
Roughness decomposition: an on-wafer methodology to discriminate mask, metrology, and shot noise contributions
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2036 since deposited on 2021-10-27
6last month
2last week
Acq. date: 2026-08-10
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Statistics
Views
2036 since deposited on 2021-10-27
6last month
2last week
Acq. date: 2026-08-10
Citations