Publication:
Roughness decomposition: an on-wafer methodology to discriminate mask, metrology, and shot noise contributions
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2037 since deposited on 2021-10-27
1last month
Acq. date: 2026-09-12
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Statistics
Views
2037 since deposited on 2021-10-27
1last month
Acq. date: 2026-09-12
Citations