Publication:
Roughness decomposition: an on-wafer methodology to discriminate mask, metrology, and shot noise contributions
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2027 since deposited on 2021-10-27
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Acq. date: 2025-12-10
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Views
2027 since deposited on 2021-10-27
1last month
1last week
Acq. date: 2025-12-10
Citations