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Impact of incorporated Al on the TiN/HfO2 interface effective work function
Publication:
Impact of incorporated Al on the TiN/HfO2 interface effective work function
Date
2008
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ka, Xiong
;
Robertson, John
;
Pourtois, Geoffrey
;
Petry, Jasmine
;
Müller, Markus
Journal
Journal of Applied Physics
Abstract
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1
since deposited on 2021-10-17
Acq. date: 2025-10-23
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2093
since deposited on 2021-10-17
Acq. date: 2025-10-23
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Downloads
1
since deposited on 2021-10-17
Acq. date: 2025-10-23
Views
2093
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations