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Impact of incorporated Al on the TiN/HfO2 interface effective work function
Publication:
Impact of incorporated Al on the TiN/HfO2 interface effective work function
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Date
2008
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ka, Xiong
;
Robertson, John
;
Pourtois, Geoffrey
;
Petry, Jasmine
;
Müller, Markus
Journal
Journal of Applied Physics
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since deposited on 2021-10-17
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since deposited on 2021-10-17
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Acq. date: 2026-01-26
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