Publication:
Comparison of Co silicidation on SiGe and SiGeC alloys
Date
| dc.contributor.author | Donaton, R. A. | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Vantomme, Andre | |
| dc.contributor.author | St. Amour, A. | |
| dc.contributor.author | Sturm, J. C. | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.imecauthor | Vantomme, Andre | |
| dc.date.accessioned | 2021-09-29T14:28:25Z | |
| dc.date.available | 2021-09-29T14:28:25Z | |
| dc.date.issued | 1996 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1216 | |
| dc.source.conference | Materials Research Society Spring Meeting. Symposium F on GeSi and Related Compounds; April 9-11, 1996; San Francisco, Calif., U | |
| dc.source.conferencelocation | ||
| dc.title | Comparison of Co silicidation on SiGe and SiGeC alloys | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |