Publication:

Silver-assisted electroless etching of Si nanowires

Date

2010
Meeting abstract
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dc.contributor.authorGielis, Sven
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorVereecken, Philippe
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.date.accessioned2021-10-18T16:33:08Z
dc.date.available2021-10-18T16:33:08Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17148
dc.identifier.urlhttp://ecsmeet3.peerx-press.org/jsp/mas/reportTechProg.jsp?MEETING_ID=101&SYM_ID=142#abs1971
dc.source.beginpage1971
dc.source.conference218th ECS Meeting Symposium 'Electroless Deposition Principles, Activation, and Applications'
dc.source.conferencedate10/10/2010
dc.source.conferencelocationLas Vegas, NV USA
dc.title

Silver-assisted electroless etching of Si nanowires

dc.typeMeeting abstract
dspace.entity.typePublication
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