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Impact of plasma exposure on organic low-k materials
Publication:
Impact of plasma exposure on organic low-k materials
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Date
2010
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Smirnov, Evgeny
;
Ferchichi, Abdelkarim
;
Huffman, Craig
;
Baklanov, Mikhaïl
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1921
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Acq. date: 2025-12-10
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Views
1921
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-10
Citations