Publication:
Pulsed CVD of amorphous GeSe for application as OTS selector
Date
| dc.contributor.author | Haider, Ali | |
| dc.contributor.author | Deng, Shaoren | |
| dc.contributor.author | Schapmans, Elie | |
| dc.contributor.author | Maes, Jan | |
| dc.contributor.author | Girard, Jean-Marc | |
| dc.contributor.author | El Hajjam, Gabriel Khalil | |
| dc.contributor.author | Kar, Gouri Sankar | |
| dc.contributor.author | Goux, Ludovic | |
| dc.contributor.author | Delhougne, Romain | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.imecauthor | Haider, Ali | |
| dc.contributor.imecauthor | Deng, Shaoren | |
| dc.contributor.imecauthor | Maes, Jan | |
| dc.contributor.imecauthor | Kar, Gouri Sankar | |
| dc.contributor.imecauthor | Goux, Ludovic | |
| dc.contributor.imecauthor | Delhougne, Romain | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.orcidimec | Goux, Ludovic::0000-0002-1276-2278 | |
| dc.date.accessioned | 2021-10-27T09:58:00Z | |
| dc.date.available | 2021-10-27T09:58:00Z | |
| dc.date.issued | 2019 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/33082 | |
| dc.source.conference | AVS ALD 2019 | |
| dc.source.conferencedate | 22/07/2019 | |
| dc.source.conferencelocation | Bellevue, WA USA | |
| dc.title | Pulsed CVD of amorphous GeSe for application as OTS selector | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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