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Pulsed CVD of amorphous GeSe for application as OTS selector

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dc.contributor.authorHaider, Ali
dc.contributor.authorDeng, Shaoren
dc.contributor.authorSchapmans, Elie
dc.contributor.authorMaes, Jan
dc.contributor.authorGirard, Jean-Marc
dc.contributor.authorEl Hajjam, Gabriel Khalil
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorGoux, Ludovic
dc.contributor.authorDelhougne, Romain
dc.contributor.authorCaymax, Matty
dc.contributor.imecauthorHaider, Ali
dc.contributor.imecauthorDeng, Shaoren
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorDelhougne, Romain
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.date.accessioned2021-10-27T09:58:00Z
dc.date.available2021-10-27T09:58:00Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33082
dc.source.conferenceAVS ALD 2019
dc.source.conferencedate22/07/2019
dc.source.conferencelocationBellevue, WA USA
dc.title

Pulsed CVD of amorphous GeSe for application as OTS selector

dc.typeMeeting abstract
dspace.entity.typePublication
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