Impact of iron contamination and SC1 generated roughness on 5nm gate oxides

dc.contributor.author	De Gendt, Stefan
dc.contributor.author	Knotter, D. M.
dc.contributor.author	Kenis, Karine
dc.contributor.author	Mertens, Paul
dc.contributor.author	Heyns, Marc
dc.contributor.imecauthor	De Gendt, Stefan
dc.contributor.imecauthor	Kenis, Karine
dc.contributor.imecauthor	Mertens, Paul
dc.contributor.imecauthor	Heyns, Marc
dc.contributor.orcidimec	De Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned	2021-09-30T08:04:47Z
dc.date.available	2021-09-30T08:04:47Z
dc.date.issued	1997
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/1805
dc.source.conference	Productronica Conference : Semiconductor Equipment and Materials - Contamination Control and Defect Reductions; 11-14 November 1
dc.source.conferencelocation
dc.title	Impact of iron contamination and SC1 generated roughness on 5nm gate oxides
dc.type	Oral presentation
dspace.entity.type	Publication
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