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Linear arrays of poly Si-Ge uncooled microbolometers with CMOS readout as long wavelength infrared sensors

Date

2001
Proceedings Paper
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dc.contributor.authorKavadias, Spyros
dc.contributor.authorDe Moor, Piet
dc.contributor.authorGastal, Martin
dc.contributor.authorVan Hoof, Chris
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorVan Hoof, Chris
dc.date.accessioned2021-10-14T18:36:22Z
dc.date.available2021-10-14T18:36:22Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5894
dc.source.beginpage246
dc.source.conferenceMicroelectronics, Microsystems and Nanotechnology. Papers presented at MMN 2000
dc.source.conferencedate20/11/2000
dc.source.conferencelocationAthens Greece
dc.source.endpage249
dc.title

Linear arrays of poly Si-Ge uncooled microbolometers with CMOS readout as long wavelength infrared sensors

dc.typeProceedings paper
dspace.entity.typePublication
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