Publication:
NBTI reliability of SiGe and Ge channel pMOSFETs with SiO2/HfO2 dielectric stack
Date
| dc.contributor.author | Franco, Jacopo | |
| dc.contributor.author | Kaczer, Ben | |
| dc.contributor.author | Mitard, Jerome | |
| dc.contributor.author | Toledano Luque, Maria | |
| dc.contributor.author | Roussel, Philippe | |
| dc.contributor.author | Witters, Liesbeth | |
| dc.contributor.author | Grasser, Tibor | |
| dc.contributor.author | Groeseneken, Guido | |
| dc.contributor.imecauthor | Franco, Jacopo | |
| dc.contributor.imecauthor | Kaczer, Ben | |
| dc.contributor.imecauthor | Mitard, Jerome | |
| dc.contributor.imecauthor | Roussel, Philippe | |
| dc.contributor.imecauthor | Witters, Liesbeth | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.contributor.orcidimec | Franco, Jacopo::0000-0002-7382-8605 | |
| dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
| dc.contributor.orcidimec | Mitard, Jerome::0000-0002-7422-079X | |
| dc.contributor.orcidimec | Roussel, Philippe::0000-0002-0402-8225 | |
| dc.date.accessioned | 2021-10-21T07:40:39Z | |
| dc.date.available | 2021-10-21T07:40:39Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2013 | |
| dc.identifier.issn | 1530-4388 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22358 | |
| dc.identifier.url | http://dx.doi.org/10.1109/TDMR.2013.2281731 | |
| dc.source.beginpage | 497 | |
| dc.source.endpage | 506 | |
| dc.source.issue | 4 | |
| dc.source.journal | IEEE Transactions on Device and Materials Reliability | |
| dc.source.volume | 13 | |
| dc.title | NBTI reliability of SiGe and Ge channel pMOSFETs with SiO2/HfO2 dielectric stack | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |