Publication:
CoSi2 formation through SiO 2
Date
| dc.contributor.author | Detavernier, C. | |
| dc.contributor.author | Van Meirhaeghe, R. L. | |
| dc.contributor.author | Cardon, F. | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-14T16:50:59Z | |
| dc.date.available | 2021-10-14T16:50:59Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5248 | |
| dc.source.beginpage | 19 | |
| dc.source.endpage | 26 | |
| dc.source.issue | 1 | |
| dc.source.journal | Thin Solid Films | |
| dc.source.volume | 386 | |
| dc.title | CoSi2 formation through SiO 2 | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |