Publication:

Record low contact resistivity to n-type Ge for CMOS and memory applications

Date

2010
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorMartens, Koen
dc.contributor.authorFirrincieli, Andrea
dc.contributor.authorRooyackers, Rita
dc.contributor.authorVincent, Benjamin
dc.contributor.authorLoo, Roger
dc.contributor.authorLocorotondo, Sabrina
dc.contributor.authorRosseel, Erik
dc.contributor.authorVandeweyer, Tom
dc.contributor.authorHellings, Geert
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorMeuris, Marc
dc.contributor.authorFavia, Paola
dc.contributor.authorBender, Hugo
dc.contributor.authorDouhard, Bastien
dc.contributor.authorDelmotte, Joris
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorSimoen, Eddy
dc.contributor.authorJurczak, Gosia
dc.contributor.authorWouters, Dirk
dc.contributor.authorKittl, Jorge
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorFirrincieli, Andrea
dc.contributor.imecauthorVincent, Benjamin
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorLocorotondo, Sabrina
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorVandeweyer, Tom
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-18T18:53:08Z
dc.date.available2021-10-18T18:53:08Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17591
dc.source.conferenceIEEE International Electron Devices Meeting - IEDM
dc.source.conferencedate6/12/2010
dc.source.conferencelocationSan Francisco, CA USA
dc.title

Record low contact resistivity to n-type Ge for CMOS and memory applications

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
20921.pdf
Size:
595.5 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions