Publication:
Process compatibility of new advanced low-k dielectric
Date
| dc.contributor.author | Ferchichi, Abdelkarim | |
| dc.contributor.author | Vanstreels, Kris | |
| dc.contributor.author | Heylen, Nancy | |
| dc.contributor.author | Beyer, Gerald | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Asakuma, S. | |
| dc.contributor.author | Nakajima, M. | |
| dc.contributor.imecauthor | Vanstreels, Kris | |
| dc.contributor.imecauthor | Heylen, Nancy | |
| dc.contributor.imecauthor | Beyer, Gerald | |
| dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
| dc.date.accessioned | 2021-10-17T22:12:16Z | |
| dc.date.available | 2021-10-17T22:12:16Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15302 | |
| dc.source.beginpage | 2158 | |
| dc.source.conference | 216th ECS Meeting | |
| dc.source.conferencedate | 1/10/2009 | |
| dc.source.conferencelocation | Vienna Austria | |
| dc.title | Process compatibility of new advanced low-k dielectric | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |