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Fine pitch 3D-TSV based high frequency components for RF MEMS applications
Publication:
Fine pitch 3D-TSV based high frequency components for RF MEMS applications
Date
2015
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vitale, Wolfgang
;
Fernández-Bolaños, Montserrat
;
Merkel, Reinhart
;
Enayati, Amin
;
Ocket, Ilja
;
De Raedt, Walter
;
Weber, Josef
;
Ramm, Peter
;
Ionescu, Adrian M.
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Acq. date: 2025-10-25
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1853
since deposited on 2021-10-23
Acq. date: 2025-10-25
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Downloads
1
since deposited on 2021-10-23
Acq. date: 2025-10-25
Views
1853
since deposited on 2021-10-23
Acq. date: 2025-10-25
Citations