Publication:

MuGFET Observation and CD measurement by using CD-SEM

Date

2008

Proceedings Paper

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Files

17778.pdf 1.22 MB

Author(s)

;

;

;

Watanabe, Kenji

;

Hasegawa, Norio

;

Sekiguchi, Kohei

;

Rooyackers, Rita

;

Collaert, Nadine

;

Vandeweyer, Tom

Statistics

1989 since deposited on 2021-10-17

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Acq. date: 2026-09-18