Publication:
Atomic layer deposition: nucleation and surface preparation
Date
| dc.contributor.author | Delabie, Annelies | |
| dc.contributor.imecauthor | Delabie, Annelies | |
| dc.date.accessioned | 2021-10-19T13:12:05Z | |
| dc.date.available | 2021-10-19T13:12:05Z | |
| dc.date.issued | 2011 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18822 | |
| dc.source.conference | ENHANCE-Winter School | |
| dc.source.conferencedate | 25/01/2011 | |
| dc.source.conferencelocation | Bochum Germany | |
| dc.title | Atomic layer deposition: nucleation and surface preparation | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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