Publication:

Effect of metal contamination and improved cleaning strategies

Date

1999
Proceedings Paper
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dc.contributor.authorMertens, Paul
dc.contributor.authorBearda, Twan
dc.contributor.authorLoewenstein, Lee
dc.contributor.authorMartin, A.R.
dc.contributor.authorHub, W.
dc.contributor.authorKolbesen, B. O.
dc.contributor.authorTeerlinck, Ivo
dc.contributor.authorVos, Rita
dc.contributor.authorBaeyens, Martien
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorKenis, Karine
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-14T11:30:42Z
dc.date.available2021-10-14T11:30:42Z
dc.date.embargo9999-12-31
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3674
dc.source.beginpage401
dc.source.conferenceDefects in Silicon III
dc.source.conferencedate2/05/1999
dc.source.conferencelocationSeattle, WA USA
dc.source.endpage413
dc.title

Effect of metal contamination and improved cleaning strategies

dc.typeProceedings paper
dspace.entity.typePublication
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