Publication:

Focused ion beam specimen preparation for transmission electron microscopy studies of ULSI devices

Date

1999
Proceedings Paper
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dc.contributor.authorBender, Hugo
dc.contributor.imecauthorBender, Hugo
dc.date.accessioned2021-10-06T10:42:22Z
dc.date.available2021-10-06T10:42:22Z
dc.date.embargo9999-12-31
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3225
dc.source.beginpage593
dc.source.conferenceMicroscopy of Semiconducting Materials
dc.source.conferencedate22/03/1999
dc.source.conferencelocationOxford UK
dc.source.endpage602
dc.title

Focused ion beam specimen preparation for transmission electron microscopy studies of ULSI devices

dc.typeProceedings paper
dspace.entity.typePublication
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