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Mobility extraction using RFCV for 80nm MOSFET with 1nm EOT HfSiON/TiN
Publication:
Mobility extraction using RFCV for 80nm MOSFET with 1nm EOT HfSiON/TiN
Date
2007
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
San Andres Serrano, Enrique
;
Pantisano, Luigi
;
Severi, Simone
;
Trojman, Lionel
;
Ferain, Isabelle
;
Toledano-Luque, M.
;
Jurczak, Gosia
;
Groeseneken, Guido
;
De Gendt, Stefan
;
Heyns, Marc
Journal
Microelectronic Engineering
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1936
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1936
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations