Publication:

Mobility extraction using RFCV for 80nm MOSFET with 1nm EOT HfSiON/TiN

Date

2007

Journal article

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Author(s)

San Andres Serrano, Enrique

;

Pantisano, Luigi

;

;

Trojman, Lionel

;

Ferain, Isabelle

;

Toledano-Luque, M.

;

;

Groeseneken, Guido

;

De Gendt, Stefan

;

Journal

Microelectronic Engineering

Statistics

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Acq. date: 2026-03-17