Publication:
Joule heating study in scaled Cu, Co and Ru interconnects
Date
| dc.contributor.author | Lofrano, Melina | |
| dc.contributor.author | Varela Pedreira, Olalla | |
| dc.contributor.author | Croes, Kristof | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.imecauthor | Lofrano, Melina | |
| dc.contributor.imecauthor | Varela Pedreira, Olalla | |
| dc.contributor.imecauthor | Croes, Kristof | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
| dc.date.accessioned | 2021-10-27T12:53:54Z | |
| dc.date.available | 2021-10-27T12:53:54Z | |
| dc.date.issued | 2019 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/33468 | |
| dc.source.conference | IEEE International Interconnect Technology Conference - IITC | |
| dc.source.conferencedate | 3/06/2019 | |
| dc.source.conferencelocation | Brussels Belgium | |
| dc.title | Joule heating study in scaled Cu, Co and Ru interconnects | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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