Publication:
Copper seed layer scaling for advanced interconnects: extendibility of I-PVD
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1959 since deposited on 2021-10-15
3last month
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Acq. date: 2026-08-06
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Statistics
Views
1959 since deposited on 2021-10-15
3last month
2last week
Acq. date: 2026-08-06
Citations