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Investigation of the role of in-plane stress behavior on ferroelectric properties of scaled-up hafnium zirconium oxide superlattices

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dc.contributor.authorDe, Gourab
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorMukherjee, Shankha
dc.contributor.authorKwon, Dae Seon
dc.contributor.authorLuciano, Federica
dc.contributor.authorMurphy, Tony
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorDelabie, Annelies
dc.contributor.authorVan Houdt, Jan
dc.contributor.imecauthorDe, Gourab
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorMukherjee, Shankha
dc.contributor.imecauthorKwon, Dae Seon
dc.contributor.imecauthorLuciano, Federica
dc.contributor.imecauthorMurphy, Tony
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecDe, Gourab::0009-0009-3457-3353
dc.contributor.orcidimecPopovici, Mihaela Ioana::0000-0002-9838-1088
dc.contributor.orcidimecMukherjee, Shankha::0000-0001-5832-8170
dc.contributor.orcidimecLuciano, Federica::0000-0001-7616-1810
dc.contributor.orcidimecDelabie, Annelies::0000-0001-9739-7419
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.accessioned2025-04-08T04:18:36Z
dc.date.available2025-04-08T04:18:36Z
dc.date.issued2025-MAR 25
dc.identifier.doi10.1039/d4nr05053c
dc.identifier.issn2040-3364
dc.identifier.pmidMEDLINE:40152490
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45505
dc.publisherROYAL SOC CHEMISTRY
dc.source.journalNANOSCALE
dc.source.numberofpages7
dc.subject.keywordsFILMS
dc.subject.keywordsTHIN
dc.title

Investigation of the role of in-plane stress behavior on ferroelectric properties of scaled-up hafnium zirconium oxide superlattices

dc.typeJournal article
dspace.entity.typePublication
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