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Conference contributions
Design and fabrication of a surface micromachined frequency tunable film bulk acoustic resonator with an extended electrostatic tuning range
Publication:
Design and fabrication of a surface micromachined frequency tunable film bulk acoustic resonator with an extended electrostatic tuning range
Date
2005
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pan, Wanling
;
Soussan, Philippe
;
Nauwelaers, Bart
;
Tilmans, Harrie
Journal
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1882
since deposited on 2021-10-16
Acq. date: 2025-10-25
Citations
Metrics
Views
1882
since deposited on 2021-10-16
Acq. date: 2025-10-25
Citations