Publication:
ALD of Al2O3 for carbon nanotube vertical interconnect and its impact on the electrical properties
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1952 since deposited on 2021-10-19
2last month
1last week
Acq. date: 2025-12-08
Citations
Metrics
Views
1952 since deposited on 2021-10-19
2last month
1last week
Acq. date: 2025-12-08
Citations