Publication:

ALD of Al2O3 for carbon nanotube vertical interconnect and its impact on the electrical properties

Date

2011

Proceedings Paper

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Files

21834.pdf 474.05 KB

Author(s)

Chiodarelli, Nicolo

;

Delabie, Annelies

;

Masahito, Sugiura

;

Kashiwagi, Yusaku

;

Richard, Olivier

;

;

;

;

De Gendt, Stefan

;

Groeseneken, Guido

;

Vereecken, Philippe

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1955 since deposited on 2021-10-19

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Acq. date: 2026-02-25