Publication:
Characterization of high and low dielectrica using low Energy Time of Flight Elastic Recoil Detection
Date
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Sajavaara, T. | |
| dc.contributor.author | Giangrandi, Simone | |
| dc.contributor.author | Arstila, K. | |
| dc.date.accessioned | 2021-10-16T00:50:35Z | |
| dc.date.available | 2021-10-16T00:50:35Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10155 | |
| dc.source.beginpage | 106 | |
| dc.source.endpage | 109 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 80 | |
| dc.title | Characterization of high and low dielectrica using low Energy Time of Flight Elastic Recoil Detection | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |