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Impact of dissolved oxygen in dilute HF solution on material etch
Publication:
Impact of dissolved oxygen in dilute HF solution on material etch
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Date
2016
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kesters, Els
;
Iwasaki, Akihisa
;
Le, Quoc Toan
;
Holsteyns, Frank
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1864
since deposited on 2021-10-23
Acq. date: 2025-12-15
Citations
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Views
1864
since deposited on 2021-10-23
Acq. date: 2025-12-15
Citations