Publication:
Microcrystalline silicon germanium for MEMS applications
Date
| dc.contributor.author | Gromova, Maria | |
| dc.contributor.thesisadvisor | Mertens, Robert | |
| dc.contributor.thesisadvisor | Van Hoof, Chris | |
| dc.date.accessioned | 2021-10-16T16:24:00Z | |
| dc.date.available | 2021-10-16T16:24:00Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2007-06 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12229 | |
| dc.title | Microcrystalline silicon germanium for MEMS applications | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |