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Design and Optimizing Backside Grating Couplers in Si-Photonics Circuits

 
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0003-3440-1972
cris.virtual.orcid0000-0003-1266-1319
cris.virtual.orcid0000-0002-4382-4558
cris.virtualsource.department0df7690f-47fe-426d-a5f9-02310e7ceb5b
cris.virtualsource.department320b6e8f-da53-4221-a48d-cd95ae93e218
cris.virtualsource.departmentb117e4ad-d441-4fcd-b4d6-06483475b88f
cris.virtualsource.orcid0df7690f-47fe-426d-a5f9-02310e7ceb5b
cris.virtualsource.orcid320b6e8f-da53-4221-a48d-cd95ae93e218
cris.virtualsource.orcidb117e4ad-d441-4fcd-b4d6-06483475b88f
dc.contributor.authorGhomashi, Mohammadamin
dc.contributor.authorBaets, Roel
dc.contributor.authorLi, Yanlu
dc.date.accessioned2026-06-04T08:05:38Z
dc.date.available2026-06-04T08:05:38Z
dc.date.createdwos2026-02-01
dc.date.issued2023
dc.description.abstractGrating couplers are essential in photonic systems, facilitating efficient light coupling between optical fibers and on-chip waveguides and allowing for wafer-level testing. With the increasing integration of photonics in communication systems like the internet, there is a growing need for grating couplers to be utilized on the backside of the chip, in addition to the top side. This paper presents a novel design for backside grating couplers by optimizing Si overlay on conventional grating couplers on silicon photonics circuits. The designed backside grating coupler simulation shows the coupling efficiency from the waveguide toward the back side is around 90% with reflection less than 2 %.
dc.identifier.doi10.1109/nusod59562.2023.10273523
dc.identifier.issn2158-3234
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/59544
dc.language.isoeng
dc.provenance.editstepusergreet.vanhoof@imec.be
dc.publisherIEEE
dc.source.beginpage117
dc.source.conferenceInternational Conference on Numerical Simulation of Optoelectronic Devices (NUSOD)
dc.source.conferencedate2023-09-18
dc.source.conferencelocationTorino
dc.source.endpage118
dc.source.journal2023 INTERNATIONAL CONFERENCE ON NUMERICAL SIMULATION OF OPTOELECTRONIC DEVICES, NUSOD
dc.source.numberofpages2
dc.title

Design and Optimizing Backside Grating Couplers in Si-Photonics Circuits

dc.typeProceedings paper
dspace.entity.typePublication
imec.internal.crawledAt2026-04-07
imec.internal.sourcecrawler
imec.internal.wosCreatedAt2026-04-07
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