Publication:

Measuring porosity: a comparative study of techniques

Date

2004
Proceedings Paper
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dc.contributor.authorKastenmeier, Bernd E.
dc.contributor.authorGidley, David W.
dc.contributor.authorVu, Long
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorKnorr, Andreas
dc.contributor.authorForan, Brendan
dc.date.accessioned2021-10-15T14:06:59Z
dc.date.available2021-10-15T14:06:59Z
dc.date.embargo9999-12-31
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9111
dc.source.beginpage507
dc.source.conferenceAdvanced Metallization Conference 2003
dc.source.conferencedate21/10/2003
dc.source.conferencelocationMontreal/Tokyo
dc.source.endpage511
dc.title

Measuring porosity: a comparative study of techniques

dc.typeProceedings paper
dspace.entity.typePublication
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