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Comparison of electrical measurements with structural analysis of thin high-k hafnium-based films
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Comparison of electrical measurements with structural analysis of thin high-k hafnium-based films
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Date
2009
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hourdakis, E.
;
Theodoropoulou, M.
;
Nassiopoulou, A.G.
;
Parisini, A.
;
Reading, M.A.
;
van den Berg, J.A.
;
Conard, Thierry
;
De Gendt, Stefan
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1900
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Acq. date: 2025-12-11
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Metrics
Views
1900
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-11
Citations