Advanced dielectrics targeting 2X DRAM MIM capacitors

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27638.pdf 526.48 KB

Author(s)

Popovici, Mihaela Ioana

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Aoulaiche, Marc

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Redolfi, Augusto

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Douhard, Bastien

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Delabie, Annelies

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Van Elshocht, Sven

Metrics

1887 since deposited on 2021-10-21

Acq. date: 2025-10-23