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Synthesis of wafer-scale TMD films and heterostructures by chemical vapor sulfurization and selenization

Date

2016
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dc.contributor.authorChiappe, Daniele
dc.contributor.authorAsselberghs, Inge
dc.contributor.authorHeyne, Markus
dc.contributor.authorIacovo, Serena
dc.contributor.authorSayan, Safak
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorCaymax, Matty
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorStesmans, Andre
dc.contributor.authorHeyns, Marc
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorRadu, Iuliana
dc.contributor.authorThean, Aaron
dc.contributor.imecauthorAsselberghs, Inge
dc.contributor.imecauthorIacovo, Serena
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorStesmans, Andre
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecIacovo, Serena::0000-0002-0826-9165
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.date.accessioned2021-10-23T10:17:38Z
dc.date.available2021-10-23T10:17:38Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26443
dc.source.conferenceE-MRS Spring Meeting
dc.source.conferencedate2/05/2016
dc.source.conferencelocationLille France
dc.title

Synthesis of wafer-scale TMD films and heterostructures by chemical vapor sulfurization and selenization

dc.typeMeeting abstract
dspace.entity.typePublication
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