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Studies on resolution with ZEP530A for EUV mask
Publication:
Studies on resolution with ZEP530A for EUV mask
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Date
2024
Proceedings Paper
https://doi.org/10.1117/12.3010109
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Shirotori, Akihide
;
Tsutsumi, Takashi
;
Yeh, Sin Fu
;
Kuroyanagi, Kenji
Journal
Proceedings of SPIE
Abstract
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Downloads
312
since deposited on 2024-06-06
42
last month
8
last week
Acq. date: 2025-12-15
Views
643
since deposited on 2024-06-06
1
last month
Acq. date: 2025-12-15
Citations