Publication:
The application of a Rapid Probe Microscope (RPM) for investigating 1D and 2D structures from EUV lithography
Date
| dc.contributor.author | Humphris, Andrew | |
| dc.contributor.author | Moussa, Alain | |
| dc.contributor.author | Dusa, Mircea | |
| dc.contributor.author | Charley, Anne-Laure | |
| dc.contributor.author | Newman, Ellis | |
| dc.contributor.author | Goulden, Jenny | |
| dc.contributor.author | Feng, Lei | |
| dc.contributor.author | Bevis, Christopher | |
| dc.contributor.imecauthor | Moussa, Alain | |
| dc.contributor.imecauthor | Dusa, Mircea | |
| dc.contributor.imecauthor | Charley, Anne-Laure | |
| dc.date.accessioned | 2021-10-28T22:40:46Z | |
| dc.date.available | 2021-10-28T22:40:46Z | |
| dc.date.issued | 2020 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/35291 | |
| dc.identifier.url | https://doi.org/10.1117/12.2552054 | |
| dc.source.beginpage | 113251M | |
| dc.source.conference | Metrology, Inspection, and Process Control for Microlithography XXXIV | |
| dc.source.conferencedate | 23/02/2020 | |
| dc.source.conferencelocation | San Jose USA | |
| dc.title | The application of a Rapid Probe Microscope (RPM) for investigating 1D and 2D structures from EUV lithography | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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