Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Ultra clean processing technologies: advanced si-surface preparation techniques
Publication:
Ultra clean processing technologies: advanced si-surface preparation techniques
Date
1994
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
187.pdf
470.97 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Heyns, Marc
;
Meuris, Marc
;
Mertens, Paul
;
Hurd, Trace
;
Schmidt, Harald
;
Verhaverbeke, Steven
;
Hatcher, Z.
;
Gräf, D.
Journal
Abstract
Description
Metrics
Views
2054
since deposited on 2021-09-29
426
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
2054
since deposited on 2021-09-29
426
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations