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Articles
Si1-xGex growth using Si3H8 by low temperature chemical vapor deposition
Publication:
Si1-xGex growth using Si3H8 by low temperature chemical vapor deposition
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Date
2010
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Takeuchi, Shotaro
;
Nguyen, Duy
;
Goossens, Jozefien
;
Caymax, Matty
;
Loo, Roger
Journal
Thin Solid Films
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1783
since deposited on 2021-10-18
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Acq. date: 2025-12-16
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Metrics
Views
1783
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-16
Citations