Publication:

Alternative metals for advanced interconnects

Date

2014-10

Meeting abstract

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Author(s)

Adelmann, Christoph

;

Wen, Liang Gong

;

;

Siew, Yong Kong

;

;

;

;

Popovici, Mihaela Ioana

;

Sankaran, Kiroubanand

;

Pourtois, Geoffrey

;

Van Elshocht, Sven

;

Boemmels, Juergen

;

Metrics

1976 since deposited on 2021-10-22

Acq. date: 2026-01-06