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On the correlation between Si+ yields and surface oxygen concentration using in situ SIMS-LEIS
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On the correlation between Si+ yields and surface oxygen concentration using in situ SIMS-LEIS
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Date
2003
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Janssens, Tom
;
Huyghebaert, Cedric
;
Vandervorst, Wilfried
;
Gildenpfennig, A.
Journal
Applied Surface Science
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1868
since deposited on 2021-10-15
Acq. date: 2026-01-07
Citations
Metrics
Views
1868
since deposited on 2021-10-15
Acq. date: 2026-01-07
Citations