Publication:
Internal stresses in aluminium interconnects
Date
| dc.contributor.author | Saerens, Annelies | |
| dc.contributor.author | Van Houtte, P. | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.date.accessioned | 2021-10-14T13:42:09Z | |
| dc.date.available | 2021-10-14T13:42:09Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4714 | |
| dc.source.beginpage | 556 | |
| dc.source.endpage | 561 | |
| dc.source.journal | Materials Science Forum | |
| dc.source.volume | 347-349 | |
| dc.title | Internal stresses in aluminium interconnects | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |