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Investigations on the plasma-surface interaction during atomic layer etching of thin transition-metal dichalcogenide films
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1953 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-12
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Metrics
Views
1953 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-12
Citations