Publication:
Calculation of pore size distribution in the ellipsometric porosimetry: method and reliability
Date
| dc.contributor.author | Mogilnikov, K. P. | |
| dc.contributor.author | Polovinkin, V. G. | |
| dc.contributor.author | Dultsev, F. N. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-14T13:24:19Z | |
| dc.date.available | 2021-10-14T13:24:19Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4592 | |
| dc.source.beginpage | 81 | |
| dc.source.conference | Low-Dielectric Constant Materials V; 5-9 April 1999; San Francisco, Ca, USA. | |
| dc.source.conferencelocation | ||
| dc.source.endpage | 86 | |
| dc.title | Calculation of pore size distribution in the ellipsometric porosimetry: method and reliability | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |