Publication:

High refractive index fluid evaluations: fluid radiation durabilitylifetimes and fluid/resist interactions

Date

2008
Proceedings Paper
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dc.contributor.authorFrench, Roger H.
dc.contributor.authorBernfeld, Adam S.
dc.contributor.authorTran, Hoang V.
dc.contributor.authorAdelman, Douglas J.
dc.contributor.authorLiberman, Vladimir
dc.contributor.authorRothschild, Mordechai
dc.contributor.authorHendrickx, Eric
dc.contributor.authorVan Roey, Frieda
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorVan Roey, Frieda
dc.date.accessioned2021-10-17T07:09:09Z
dc.date.available2021-10-17T07:09:09Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13738
dc.source.conference5th International Symposium on Immersion Lithography Extensions
dc.source.conferencedate22/09/2008
dc.source.conferencelocationDen Haag Nederland
dc.title

High refractive index fluid evaluations: fluid radiation durabilitylifetimes and fluid/resist interactions

dc.typeProceedings paper
dspace.entity.typePublication
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