Publication:
Reliability of HfSiON gate dielectrics
Date
| dc.contributor.author | O'Connor, Robert | |
| dc.contributor.author | Hughes, Greg | |
| dc.contributor.author | Degraeve, Robin | |
| dc.contributor.author | Kaczer, Ben | |
| dc.contributor.author | Kauerauf, Thomas | |
| dc.contributor.imecauthor | Degraeve, Robin | |
| dc.contributor.imecauthor | Kaczer, Ben | |
| dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
| dc.date.accessioned | 2021-10-16T03:44:10Z | |
| dc.date.available | 2021-10-16T03:44:10Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10948 | |
| dc.source.beginpage | 68 | |
| dc.source.endpage | 71 | |
| dc.source.journal | Semiconductor Science and Technology | |
| dc.source.volume | 20 | |
| dc.title | Reliability of HfSiON gate dielectrics | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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